Locate pattern defects, verify geometry and optical contrast, and evaluate localized opaque-defect or clear-defect repair.
Photomask inspection and chromium repair
Microscope-guided repair for patterned chromium surfaces.
Microscope-based inspection and repair helps locate isolated chromium defects before a mask is released. The repair route can be selected for opaque-defect removal or clear-defect opacity restoration, then verified again under the inspection microscope against the approved artwork and defect limits.
Chromium repair microscope platform
A microscope-guided platform supports defect review at the patterned surface and provides a controlled working view for local repair. It is useful when a small isolated defect should be addressed without changing the surrounding artwork.
Defect location and classification before repair
Clear-defect repair restores opacity in missing-chromium areas
Opaque-defect repair removes excess chromium from clear areas
Repair area, polarity and surrounding pattern protected by the drawing
Olympus MX50 inspection platform
The Olympus MX50 platform provides a stable microscope view for pre-repair review, post-repair confirmation and visual comparison with the approved pattern. The actual magnification, lighting, measurement field and acceptance method are defined for each product.
Pattern surface review at the microscope focal plane
Before-and-after comparison for repaired features
Inspection of line continuity, pinholes, local opacity and edge condition
Inspection records linked to the mask drawing revision
Chromium repair is a localized corrective operation, not a substitute for a new mask when the artwork, registration or defect density exceeds the agreed acceptance limits.
Pattern inspection checks dimensions, location, defects and optical condition. Local chromium repair addresses suitable excess- or missing-chrome defects.
Use the approved artwork, inspection regions and acceptance limits for both inspection and repair, then re-inspect affected features.
What must be checked after a repair?
Recheck the affected area, adjacent lines or openings, leakage and blockage, and any specified geometry or optical properties. A repair record does not replace final acceptance.
