
Sputter coating line for micro-nano and multilayer films
Our coating development scope covers 10–1,000 nm micro-nano films and multilayer stacks, with film uniformity targeted to ±1% when defined by the agreed measurement area. We also develop 0.1–20 µm coating processes where a thicker functional layer is required.
- Film thickness development: 10–1,000 nm for micro-nano and multilayer stacks
- Thicker coating development: 0.1–20 µm
- Uniformity target: ±1% over the agreed measurement area
- Low-defect-density coating development with high-precision measurement
