Match the source and detector
Use a measurement response suited to the exposure source. A 365 nm process needs a detector and method suitable for that band; a UV label alone is not enough.
Quality, Inspection & Delivery
UV Radiometer
Record the exposure conditions behind a repeatable process.
During patterning, we measure the exposure light at defined positions with a detector suited to the source. Recording irradiance alongside exposure settings helps compare process runs and investigate changes in the developed pattern.
What this measurement resolves
Measure at a defined position
Record detector position, working distance, exposure settings and measurement date. Compare positions under the same setup when a field review is required.
Connect irradiance and dose
Record irradiance and exposure time. Cumulative dose is reported only with a suitable validated integration or measurement method, including how source variation is handled.
Results you can review
- Irradiance and measurement position
- Exposure settings and equipment state
- Dose record when the method is validated
Define before measurement
- Source wavelength and detector response
- Measurement plane, distance and sampling positions
- Exposure mode and required process record
Connect the reported values with the part or witness piece, measurement positions and drawing revision. Include the required records in the order scope. Review delivery records
Measurement notes
This is a process-control measurement. It does not replace finished-pattern dimensional inspection, defect review or an agreed product acceptance test. Detector bandwidth and dose capability must match the actual configuration.
A common question
Is exposure time enough to compare two runs?
No. Changes in source output, position or setup can change the delivered exposure. Compare suitable irradiance or dose records together with the exposure conditions.
Complementary checks
Stylus Profilometer
Review resist thickness alongside exposure conditions.
Precision Measuring Microscope
Check finished pattern dimensions after the exposure and development steps.
Discuss inspection & delivery
Share the critical acceptance items, required records, quantity and delivery needs. Use your existing drawing for the dimensions already defined.